Translume’s processes enable a fully three-dimensional glass MEMS capability, which we call GMEMS. In contrast to inherently planar traditional Silicon MEMS, GMEMS enables sturdy 3-D structures with mechanical motion capability in all directions. By combining femtoEtch, to create structures, with femtoWrite, to create micron-scale waveguides throughout the glass structure, many different types of sensors can be fabricated, all of which are immune to electromagnetic interference.

The glass surface finishes that can be achieved with femtoEtch are smooth on the order of several hundred nanometers. FemtoEtch and femtoWrite can create fully three-dimensional microfluidic systems in glass. As compared with other materials often used in these applications, fused silica is able to withstand greater variations in temperature and humidity. It is compatible with all fluids, with the exception of HF. It is also more transparent, especially in the UV, and it does not autofluoresce. With the addition of optics, a fully integrated and extremely robust microfluidic detection system can be created in a single block of glass.